Specification

Digital Mass flow controller

Digital Mass flow Meter

Range

2 SCCM~ 30 SL/M

Turn Down Ratio

50:1

100:1

Accuracy

± 1% F.S

Linearity

± 0.5% F.S

Repeatability

± 0.2% F.S

Response Time

< 2s

<0.8s

Communication

RS232/485.MODBUS

Output

0~5V,4-20mA,1-5V

Power Supply

±15VDC,24VDC

Operation Temperature

0~50°C

Operation Pressure

Operation DP:0.05~0.5Mpa

Operation pressure drop: <0.01Mpa

Max operation pressure

3MPa/10MPa

Electrical Interface

DB15

leak rate

1×10-9SCCSHe

Temperature coefficient

±0.025%F.S/°C

Base material

Stainless steel

Seal Material

Viton, neoprene, nitrile rubber

Connector

Φ3,Φ6,1/8”,1/4”